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Parylene Vacuum CVD Coating Equipments


Classification:

CVD Vacuum Equipment


Item:PTP-12V Effective Volume of the chamber: ⌀1176 * 1319 mm
Floor Space:(L)3815 *(W)2690 *(H)1728 mm
Electric quantity: 20000W

Product Description


【Operating Principle】

The parylene coating equipment is a vacuum coating system that uses the chemical vapor deposition (CVD) process. The entire working process takes place in a vacuum environment and mainly consists of three core steps:Vaporization-Pyrolysis-Deposition

It is specifically designed to form ultra-thin and uniform parylene protective coatings, providing comprehensive protection for the products.

 

【Advantages】

Excellent conformality, capable of uniformly covering complex shapes, sharp edges, and crevices;

Uniform film layer, thickness can be precisely controlled, with a thickness uniformity of ±5%;

Excellent protective performance, featuring high insulation strength, resistance to high and low temperatures (-200°C to 350°C), corrosion resistance, resistance to acids and alkalis, waterproof and moisture-proof properties;

 

【Application】

Aerospace and Defense、Medical Devices、Automotive 、Electronics and Semiconductor 、Elastomers、etc 

【Why choose Penta Nano】

Reliable

Recipe-based automation ensures reproducible coatings to meet stringent quality standards

Low Maintenance

Precision engineering and robust materials minimize the need for frequent downtime or repairs.

High Quality

Penta’s equipment is CE certified to meet EU safety, health and environmental protection requirements.

 

Parylene Vacuum CVD Coating Equipments are advanced systems designed for depositing ultra-thin, uniform, and conformal protective coatings on a wide range of substrates. Using chemical vapor deposition (CVD) technology under vacuum conditions, the parylene material is first vaporized, then pyrolyzed into monomers, and finally polymerized directly onto the surface of the components. This process ensures a pinhole-free coating that provides excellent moisture resistance, chemical stability, dielectric insulation, and biocompatibility.

These coating systems are widely used in medical devices, electronic components, sensors, aerospace parts, and automotive electronics, where high reliability and protection are required. The equipment offers precise control of coating thickness, high deposition efficiency, and consistent film quality even on complex geometries. With stable vacuum performance and automated operation, Parylene Vacuum CVD Coating Equipments improve product durability, extend service life, and enhance overall performance in demanding environments.

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Nitrogen Vacuum Oven

Application Area

FAQ


It is a polyester protective material which is transparent and colourless. It is applied to the vacuum process at the room temperature, vacuum treatment pressure is carried out at 10-5torr or below, while the Parylene coating processing is formed at about 0.1torr. The thickness of the coating can be controlled between 1 and 100microns, which was developed by the American patent in the early sixties, and was firstly applied in the field of microelectronic components in US military printed circuit boards, aerospace and underwater launchers, it was included in the US military standard in 1972: MIL-I-46058C.

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