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Size of device: (L) 600 * (W) 760 * (H) 1440 mm
Floor space: 3.067 ㎡
Chamber size: φ292*308 mm (Volume:20.6L)
Effective chamber size: φ187*275 mm (Volume:7.54L)
Electric quantity: 4000W
The appearance of the equipment and the volume of the vacuum chamber is moderate, covers a small area, the film is uniform and high precision, very suitable for research institutes, schools and other laboratories.
Size of device: (L) 1859 * (W) 900 * (H) 1190 mm
Floor space: 7.243 ㎡
Chamber size: φ292*308 mm (Volume: 20.6L)
Effective chamber size: φ240*250 mm (Volume: 11.3L)
Electric quantity: 6000W
The appearance of the equipment is moderate with the volume of the vacuum chamber, covering an area larger than PTP-1V, and the film layer is uniform and high precision. It is suitable for a certain amount of research institutes, schools and other laboratories.
Size of device: (L)2211 * (W)1191 * (H)1580 mm
Floor space: 8.707 ㎡
Chamber size: φ480*787 mm (Volume: 142.3L)
Effective chamber size: φ420*743 mm (Volume: 102.9L)
Electric quantity: 8000W
The equipment has moderate appearance and vacuum chamber volume, covers an area larger than PTP-3HV, and the film layer is uniform and high precision, which is suitable for small and medium-sized enterprises.
What is Parylene?
It is a polyester protective material which is transparent and colourless. It is applied to the vacuum process at the room temperature, vacuum treatment pressure is carried out at 10-5torr or below, while the Parylene coating processing is formed at about 0.1torr. The thickness of the coating can be controlled between 1 and 100microns, which was developed by the American patent in the early sixties, and was firstly applied in the field of microelectronic components in US military printed circuit boards, aerospace and underwater launchers, it was included in the US military standard in 1972: MIL-I-46058C.

Vacuum Coating Equipment
Independent Research And Development, Design, Production, Customizable
SINCE 2001
Penta Nanotechnology (Suzhou) Co., Ltd
Penta Nanotechnology (Suzhou) Co., Ltd is a Singapore-owned enterprise which was founded in December 2001. It is located in Suzhou Industrial Park. Penta NanoTechnology concentrates on self-development, production and sales of Chemical Vapor Deposition Equipment, Microelectronic Equipment, Xenon Difluoride (Xef2) Etching Machine, Vacuum Degassing Furnace, Xenon Difluoride Raw material. Parylene Nano Material contains C powder, N powder, F powder, D powder and AF4 powder.

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2025-07-18
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